{"product_id":"physical-design-and-mask-synthesis-for-directed-self-assembly-lithography","title":"Physical Design and Mask Synthesis for Directed Self-Assembly Lithography","description":"This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.","brand":"EMKA","offers":[{"title":"Default Title","offer_id":56450144239947,"sku":"9783030094553","price":127.67,"currency_code":"EUR","in_stock":true}],"url":"https:\/\/emka.si\/products\/physical-design-and-mask-synthesis-for-directed-self-assembly-lithography","provider":"EMKA","version":"1.0","type":"link"}